首页 > 论文 > 应用光学 > 33卷 > 3期(pp:511-514)

横向剪切干涉中剪切量的选取及分析

Selection and analysis of shearing displacement in lateral shearing interferometry

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

横向剪切干涉技术是一种直接测量波面相位分布的光学测量方法,由于其不需要高精度的参考平面,并且能够测量偏离量较大的表面面形偏差,因此得到了更为广泛的应用。但是,通常情况下剪切量大小的选择凭工作经验来确定。为了给出一种定量的剪切量判定方法,论文提出了一种基于Zernike多项式拟合的剪切量判定方法,通过计算机仿真和实验给出了剪切量与测量误差的关系,发现剪切量为测量口径1/10时即可达到良好的测量结果。

Abstract

Lateral shearing interferometry is an important optical measurement technology which obtains the wave-front phase distribution directly. Due to the ability of measuring surface shape of large deviation without high precision reference plane, it has been used in various fields;however, the selection of shearing displacement depends on work experience. In order to provide an explicit determination method, a shearing displacement determination method based on Zernike polynomial fitting is proposed, and the relation between shearing displacement and measurement error is given by computer simulation and experiment.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O439;TH744

DOI:10.5768/jao201233.0302002

基金项目:陕西省教育厅项目(2008KW-11,2009JK487)

收稿日期:2011-03-13

修改稿日期:2011-04-28

网络出版日期:--

作者单位    点击查看

刘丙才:西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西 西安 710032
田爱玲:西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西 西安 710032
王红军:西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西 西安 710032
王春慧:西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西 西安 710032

联系人作者:刘丙才(bingcailiu@yahoo.com.cn)

备注:刘丙才(1981-),男,山东梁山人,博士研究生,助教,主要从事光学干涉测量和三维轮廓测量方面的研究工作。

【1】WOLFGANG STEINCHEN, LIANXIANG YANG, GERHARD KUPFER, et al. Application of laser diodes in digital speckle pattern shearing interferometry[J]. SPIE, 1998, 3415:87-94.

【2】FERRAROA P, ALFIERIA D, DE NICOLAB S, et al. Combining lateral shear interferometry with digital holography for quantitative phase microscopy[J]. SPIE, 2006, 6341: 1-6.

【3】HAREESH V, TIPPUR, LIMING XU. Real-time shearing interferometry for studying interfacial crack tip fields under quasi-static and dynamic loading conditions[J]. SPIE, 1995, 2544:223-235.

【4】GUO Xiao-xian, ZENG Ai-jun, HUANG Hui-jie. Spatial phase-shifting lateral shearing interferometer[J]. SPIE, 2009, 7160: 1-8.

【5】王红军, 田爱玲, 王吉元. 基于Radon变换的横向剪切干涉图的自动检测技术[J]. 光学技术, 2006, 32(5): 785-786.
WANG Hong-jun, TIAN Ai-ling, WANG Ji-yuan. The inspection technology of the displacement of shear on the lateral shearing interferometer based on radon transform[J].Optical Technique, 2006, 32(5): 785-786.(in Chinese with an English abstract)

【6】RYAN MIYAKAWA, PATRICK NAULLEAU, KEN GOLDBERG. Analysis of systematic errors in lateral shearing interferometry for EUV optical testing[J]. SPIE, 2009, 7272: 1-6.

【7】JOSEP VIDAL, JOSEP NICOLAS, JUAN CAMPOS. Analysis of the positioning error on lateral shearing surface reconstruction with a Fizeau interferometer[J]. SPIE, 2009, 7390: 1-8.

【8】WOLFGANG STEINCHEN, LIANXIANG YANG, GERHARD KUPFER, et al. Vibration analysis by digital speckle pattern shearing interferometry[J]. SPIE, 1997, 3098: 158-165.

【9】PETZING J N. Vibration analysis using fast speckle metrology[J]. SPIE, 1999, 3745:134-140.

【10】刘中本. 条纹扫描干涉测试技术及其应用[J]. 应用光学, 1992, 15(6): 50-54.
LIU Zhong-ben. The fringe scanning interference test technique and its application[J]. Journal of Applied Optics, 1992, 15(6): 50-54. (in Chinese with an English abstract)

【11】LIU Bing-cai, TIAN Ail-ing, WANG Hong-jun, et al. Analysis of asphericity measurement in lateral shearing interferometry[J]. SPIE, 2009, 7522: 1-6.

【12】LIU Bing-cai, TIAN Ai-ling, WANG Hong-jun, et al. Identification and quantification of non-commonpath error in lateral shearing interferometry[J]. SPIE, 2010, 7656: 1-6.

引用该论文

LIU Bing-cai,TIAN Ai-ling,WANG Hong-jun,WANG Chun-hui. Selection and analysis of shearing displacement in lateral shearing interferometry[J]. Journal of Applied Optics, 2012, 33(3): 511-514

刘丙才,田爱玲,王红军,王春慧. 横向剪切干涉中剪切量的选取及分析[J]. 应用光学, 2012, 33(3): 511-514

被引情况

【1】王红军,张聪,田爱玲,刘丙才. 二维横向剪切干涉中采样点的选取. 光子学报, 2015, 44(3): 312002--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF