为了使快速控制反射镜(FSM)能在车载、舰载等运动环境下稳定工作, 并具有很高的控制精度, 研制了一套高精度角位移测量装置, 该装置通过精确地提供反射镜摆角信息作为系统的反馈信号来实现伺服闭环控制。针对传统快速控制反射镜位置信息反馈传感器的精度低以及不适于动载环境等缺点, 采用田字裂相信号提取方法设计了基于莫尔条纹计数测量原理的精密光栅, 并通过计算机进行仿真分析设计了具有抗干扰能力和耐高低温变化的绝对零位信号, 其对比度达0.25。对信号处理电路进行高度集成, 实现了小型化。实验结果表明, 反射镜角位移测量装置测量的反射镜角分辨率为0.15″, 测角精度优于0.4″, 完全能满足机动式条件下, 高能激光发射系统对FSM控制精度的要求。

To control of a Fast Steering Mirror(FSM) stably and precisely in the circumstances of vehicles and ships, a high precision device for angle displacement measurement was designed to provide the mirror sway angle information as a feedback signal to realize the servo closed loop control. As traditional detectors for the FSM are disadvantageous to high-precision work in the mobile circumstance, a precision grating based on the Moire fringe counting measurement principle was designed by using the Chinese characters Tian splitting phase method. At the same time, the absolute zero point signal against jamming and temperature changing was designed through computer simulation and its contrast ratio was 0.25. Furthermore, in order to realize the miniature, the signal processing circuit was highly integrated. Experimental results indicate that the resolution of the measurement device is 0.15″and the angle precision is higher than 0.4″. This device satisfies the requirements of angle measurement precision in the mobile condition for the high-energy laser projecting systems.