强激光与粒子束, 2012, 24 (8): 1882, 网络出版: 2012-08-09
微靶装配中靶球几何量的高精度测量
High-precision measuring technique for geometric quantities of microsphere target in microtarget assembly
微靶装配 靶球 几何量 激光共焦测量 目标提取 microtarget assembly microsphere target geometric quantities laser confocal measurement target extraction
摘要
为满足微靶装配过程中靶球和靶腔相对位置的严格的要求，保障惯性约束聚变实验的成功，针对机器视觉的几何量测量精度很难达到5 μm以下的不足，设计了利用具有亚μm级精度的激光共焦测头对装配中的靶球进行采点扫描以获取其尺寸和位置的非接触测量方法，借助于在线监测系统运动轴的高精度定位，通过上下两个激光共焦测头的组合测量，并采用一种快速而准确的基于点阵插值细分和目标两级提取的测量算法，使在线监测系统的球体几何量测量精度达到了2 μm。
Abstract
To meet the high-precision requirement of microtarget assembly in inertial confinement fusion (ICF) experiments, this paper proposes a new technique for the size and position of measuring the size and position of the microsphere target in microtarget assembly. The technique employs two laser confocal probes of sub-micrometer precision to realize scanning measurement, and an algorithm based on matrix subdivision and two-step target extraction to implement calculation. The results show that a 2 μm measurement precision has been achieved.
石帅, 张林, 吴文荣, 裘祖荣. 微靶装配中靶球几何量的高精度测量[J]. 强激光与粒子束, 2012, 24(8): 1882. Shi Shuai, Zhang Lin, Wu Wenrong, Qiu Zurong. High-precision measuring technique for geometric quantities of microsphere target in microtarget assembly[J]. High Power Laser and Particle Beams, 2012, 24(8): 1882.
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