中国激光, 1988, 15 (11): 652, 网络出版: 2012-08-13
超外差光学膜厚的精密测量
Opto-heterodyne measurement of thickness of coated films
摘要
本文用纵向塞曼双频稳频He-Ne激光器作光源,采用光学超外差技术与相位高精度测量相结合,测量光学膜膜厚.测量灵敏度为0.1nm量级.实验结果与理论分析相符合,并与其它测量方法的测量结果进行了比较.
Abstract
Thickness measurement of the coated film is put forward which combines the opto-heterodyne technique and the precise phase interferometry. Its thickness measurement sensitivity is of the order of 0.1nm level. The experimental results conform to the theoretical analyses. Comparison with other instruments is also given.
林跃, 周志尧, 王润文. 超外差光学膜厚的精密测量[J]. 中国激光, 1988, 15(11): 652. Lin Yao, Zhou Zhiyao, Wang Runwen. Opto-heterodyne measurement of thickness of coated films[J]. Chinese Journal of Lasers, 1988, 15(11): 652.
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