波前校正器是自适应光学系统中的关键部件, 相关技术已得到了多年的积累与发展。本文介绍了多种目前常用的波前校正器件, 包括分离促动器连续表面变形镜、拼接子镜变形镜、薄膜变形镜、双压电片变形镜、微电子机械系统变形镜以及基于液晶技术的空间光调制器和自适应次镜等, 给出了它们的实现方式及其基本工作原理, 并从空间校正频率和校正速度等方面对各校正器的性能进行了比较。最后, 总结了在新应用的需求下, 波前校正器件的技术创新及发展趋势。

Wavefront correctors are the key components of the adaptive optical systems and the techniques to fabricate wavefront correctors have been developed for many years. This paper introduces several kinds of wavefrom correctors that are commonly used in adaptive optical systems, such as the deformable mirror with discrete actuators and continuous faceplate, segmented deformable mirror, membrane deformable mirror, bimorph deformable mirror, MEMS deformable mirror, liquid crystal corrector and the adaptive secondary mirror. The realization methods of the wavefront correctors and their working principles are presented in detail, and the performance, the number of degrees of freedom and the speed of response are compared. Finally, it summarizes the technology innovations and development trends of the wavefront correctors in the new applications.