本文研究了不同组成As-S系薄膜在Ar+激光光照下光学性质的变化过程。实验结果表明,As2S3。膜具有最大的光学性质光致变化,且显现出是体效应,并讨论了它的结构变化动力学。本文还研究了新鲜As2S3膜在退火-照光循环中折射率的变化行为,可逆的折射率变化约为0.03,不可逆的折射率变化约为0.1。

The change process of optical properties in As-S films with different compositions during exposure to Ar+ laser light is studied. The experimental results show that photo-induced change of the optical properties of As2S3 film is the largest, and is a volume effect. The kinetics of the structure change is discussed. The change behaviour of the refractive index in newly deposited As2 S3 film under the cycles of annealing-exposure is also studied, reversible change of refractive index is about 0.03, and the irreversible about 0.1.