Frontiers of Optoelectronics, 2010, 3 (4): 408, 网络出版: 2012-09-20
Magnetorheological finishing of optical surface combined with symmetrical tool function
Magnetorheological finishing of optical surface combined with symmetrical tool function
摘要
Abstract
This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0.067l from 0.519l (l = 632.8 nm, RMS) after 75 min finishing.
Haobo CHENG, Yunpeng FENG, Tan WANG, Zhichao DONG. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Frontiers of Optoelectronics, 2010, 3(4): 408. Haobo CHENG, Yunpeng FENG, Tan WANG, Zhichao DONG. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Frontiers of Optoelectronics, 2010, 3(4): 408.