Frontiers of Optoelectronics, 2010, 3 (4): 408, 网络出版: 2012-09-20  

Magnetorheological finishing of optical surface combined with symmetrical tool function

Magnetorheological finishing of optical surface combined with symmetrical tool function
作者单位
1 School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
2 Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Hong Kong, China
摘要
Abstract
This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0.067l from 0.519l (l = 632.8 nm, RMS) after 75 min finishing.

Haobo CHENG, Yunpeng FENG, Tan WANG, Zhichao DONG. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Frontiers of Optoelectronics, 2010, 3(4): 408. Haobo CHENG, Yunpeng FENG, Tan WANG, Zhichao DONG. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Frontiers of Optoelectronics, 2010, 3(4): 408.

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