为了精密控制激光光束的平行移动, 利用双面金属包覆波导结构在导波共振激发时对古斯-汉欣(Goos-Hnchen)位移的增强效应, 采用光学非线性晶体材料作为波导的导波层, 通过在波导中两层金属膜间加入控制电压, 改变波导参量, 实现反射光侧向位移的电调谐, 得到了720μm范围内的光束平移电控, 控制精度可达25nm。结果表明, 实验结果和理论模拟吻合较好。预计本工作对光学微加工领域应用具有积极而广泛的意义。

Using the optical nonlinear crystal materials as the guiding layer, symmetrical metal-cladding waveguide configuration was employed in the measurement of lateral shift of the laser beam. Due to the enhancement effect of Goos-Hnchen at the resonant condition, lateral shift of the laser beam can be controlled precisely by applying DC voltage on the guiding-layer. 720μm maximum variation of the lateral shift was observed in the experiment and the measurement precision was 25nm. The experimental results are in agreement with the simulation. It is expected that this work will provide tools and resources of potential application in micro-fabrication.