光学学报, 2012, 32 (11): 1112004, 网络出版: 2012-10-25
一种机械扫描式精密相移测长方法
A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning
测量 相移干涉法 长度测量方法 光学设计 压电传感器 标准具 measurement phase-shifting interferometry length measurement method optical design piezoelectric transducer etalon
摘要
以相移干涉测长为应用背景,提出了一种基于“机械扫描”的相移测长方法。利用超高弹性石英材料研制出了干涉测长所需的单体3路相移装置,并利用该相移装置建成了相移测长装置,成功地将位移传感器的量值在线溯源到光学频率标准,从而实现了对3路相移的准确测量。介绍了一种引入步长控制误差的“新五幅相移”实现相位解算方法,算法准确度达到0.01%。对不确定度的定量分析结果表明,基于该机械扫描式相移技术构建的绝对长度测量系统准确度可达0.5 nm。
Abstract
Based on the application background of length measurement, a novel phase-shifting interferometry is presented. A precise phase-shifting device for length measurement by pressure variation is developed. This device based on single-quartz component is made to carry out the generation of triple phase-shifting, and an essential technique to make online calibration of the capacitor sensor is also realized. The original phase is solved by the developed five-interferogram algorithm with the uncertainty of 0.01% phase periods. The experimental results show that the phase-shifting obtained by this device is up to 1 μm and the variation for length measurement is 0.5 nm.
罗志勇, 顾英姿, 陈朝晖. 一种机械扫描式精密相移测长方法[J]. 光学学报, 2012, 32(11): 1112004. Luo Zhiyong, Gu Yingzi, Chen Zhaohui. A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning[J]. Acta Optica Sinica, 2012, 32(11): 1112004.