Frontiers of Optoelectronics, 2008, 1 (1): 197, 网络出版: 2012-11-06
Power spectral density measurement for large aspheric surfaces
Power spectral density measurement for large aspheric surfaces
摘要
Abstract
To ensure the safe and normal operation of the whole optical system, it is important to test and evaluate the quality of optical components. The article explores the advantages and disadvantages of general parameters used in aspheric surface testing, the composition of the system, the principle of operation and the design of related power spectral density (PSD) software used in testing large aspheric surfaces with Shack-Hartmann and phase shifting interferometer. The results indicate that PSD can give the spatial frequency distribution of the wavefront aberration when large aperture phase shifting interferometer is used as an instrument to test the wavefront, and this can also be applied as an evaluation standard in testing the quality of optical components. In addition, this paper describes the test results of optical components in the size of 64 mm×64 mm.
Wei CHEN, Hanmin YAO, Fan WU, Shibin WU, Qiang CHEN. Power spectral density measurement for large aspheric surfaces[J]. Frontiers of Optoelectronics, 2008, 1(1): 197. Wei CHEN, Hanmin YAO, Fan WU, Shibin WU, Qiang CHEN. Power spectral density measurement for large aspheric surfaces[J]. Frontiers of Optoelectronics, 2008, 1(1): 197.