为了实现工业用高重复频率ArF准分子激光器脉冲能量稳定, 从电源控制的角度进行了脉冲能量控制技术的基础研究。介绍了高重复频率ArF准分子激光器能量稳定闭环控制原理, 使用近似方法建立了准分子激光器脉冲能量和放电电压的函数模型, 提出一种基于实时检测脉冲能量的电压调节比例积分算法, 并结合函数模型和控制算法进行了MATLAB仿真。结果表明, 建立的脉冲能量模型是合理的, 且提出的比例积分算法在提高激光器脉冲输出能量稳定性方面是有效的。

In order to achieve the pulse energy stability of high-repetition-rate ArF excimer lasers, the technology of pulse energy control was studied from the perspective of power supply adjustment. The closed-loop control principle for pulse energy stability of high-repetition-rate ArF excimer lasers was introduced. The function model between the output energy of excimer laser and the discharge voltage was established with approximation method, and the proportion-integration(PI) algorithm for real-time adjustment of discharge voltage based on the real-time detection of pulse energy was proposed. Combined with the function model and the control algorithm, simulation was carried out with MATLAB software. The simulation results indicate that the pulse energy model is reasonable and the PI algorithm is feasible for improving the laser pulse energy stability.