综述了飞秒激光直写光波导的加工过程和表征方法、可直写形成光波导的不同透明光学材料以及直写光波导应用的进展。总结了飞秒激光直写引起的折射率变化与材料有关, 同时还依赖于加工的脉冲能量、脉冲宽度、偏振以及扫描速度等。指出飞秒激光微加工在光子器件领域的有很好的应用前景。

The fabrication process, investigation of femtosecond laser direct writing optical waveguides, different transparent materials for direct writing optical waveguides, and the applications of direct writing optical waveguides were reviewed. As is summarized, the induced refractive index changes are materials related, and also dependent on laser energy, pulse duration repetition rate, polarization, and the scan velocity, etc. The femtosecond laser micromachining technique has extensive application prospects in the field of photonic devices.