对垂直腔面发射激光器的产热情况进行了分析, 简化了热源, 建立了列阵的热传导模型, 利用Comsol Multiphysics软件对模型进行了模拟计算。通过改变底发射列阵的单元直径和间距, 对列阵的温升进行了计算。研制了4×4、5×5和8×8三种不同尺寸的列阵, 功率分别为580, 1 440, 2 100 mW, 对应功率密度分别为115, 374, 853 W/cm2。通过光谱的波长漂移计算出4 A时的温升分别为120, 58, 38 ℃。采用小孔径单元制作的列阵可以有效地降低列阵单元间的热串扰, 获得高功率输出。

The heating distribution of vertical cavity surface emitting laser array (VCSEL) is analyzed. The heating source is simplified and the heat transport model is established. The Comsol Multiphysics software is used for all numerical simulations. The temperature rise is computed by changing the cell diameter and gap between the adjacent cells. Three kinds of arrays are manufactured: 4×4, 5×5 and 8×8. The power are 580, 1 440 and 2 100 mW, the corresponding power density are 115, 374 and 853 W/cm2, respectively. The values of temperature rise at 4 A are 120, 58 and 38 ℃, which are obtained by redshift of wavelength. The arrays made up of small size cells can effectively reduce the thermal crosstalk and improve the output power.