应用激光, 2012, 32 (5): 420, 网络出版: 2012-11-28
LIBS法测定薄膜组份比率精确度的研究
The Research on Measuring Component Ratio of Thin Films by LIBS
激光诱导击穿光谱 分析线对 铁电薄膜 组份比率 laser induced breakdown spectroscopy analytical line pair ferroelectric film component ratio
摘要
在常压空气环境下, 利用脉冲激光作用于硅基铝酸镧薄膜, 实验发现激光器能量为20 mJ, 脉冲频率3 Hz, 薄膜损伤小且能获得较好品质的光谱; 并依据两分析元素光谱强度比与原子数比之间成一定的线性关系, 对分析线的选择进行了实验研究, 发现线性拟合度不仅与分析线对的选择有关, 而且与分析样品元素比率大小有关。 测量结果表明, 当分析线对为La II 394.91 nm/ Al I 394.40 nm时, 其测量相对误差为0.59 %; 分析线对为La II 394.91 nm/Al I 396.15 nm时, 相对误差是8.32%。可见合理选择分析线对有利于提高薄膜组份比率检测精确度。
Abstract
In this paper, we found better spectrum with smaller damage when the pulse laser action on LaAlO3 based on silicon at ordinary pressure was set 20 mJ and 3 Hz. According to the linear relation between the spectral intensity ratio and the atomicity ratio of two analytical chemical elements, we investigated on the analysis line pairs. It was found that the linear fitting degree have related with analysis line pairs and quantity of analytical elements ratio. The measurement results show that the analysis line pair was La II394.91 nm/ Al I394.40 nm, the measuring relative error is 0.59 %, If the analysis line pair was La II 394.91nm/Al I 396.15 nm, the measuring relative error is 8.32 %.This is helpful to improve the measuring accuracy of film component ratio.
张金平, 董开虎, 范青, 赵峰, 李旭, 陈金忠, 郭庆林. LIBS法测定薄膜组份比率精确度的研究[J]. 应用激光, 2012, 32(5): 420. Zhang Jinping, Dong Kaihu, Fan qing, Zhao Feng, Li Xu, Chen Jinzhong, Guo Qinglin. The Research on Measuring Component Ratio of Thin Films by LIBS[J]. APPLIED LASER, 2012, 32(5): 420.