实验研究了不同脉冲能量的飞秒激光诱发硅PIN光电二极管瞬态响应信号的特性。发现探测器响应瞬态响应信号相继出现了三个明显的相位， 深入讨论了飞秒激光诱发的高注入载流子在瞬态响应信号演化过程中所起的作用。结果表明，高注入载流子产生的空间电荷屏蔽效应是导致 瞬态响应信号呈现三个相位的主要因素，它导致瞬态响应信号的持续时间主要取决于载流子双极扩散的速度。增加飞秒激光的脉冲能量会 进一步延长探测器瞬态响应信号的持续时间。因此，飞秒激光会削弱探测器的工作性能，尤其是在高速信号探测中的工作性能。

The transient response of silicon p-i-n photodiodes irradiated by femtosecond laser with a range of pulse energy levels was investigated experimentally. The spatiotemporal response exhibits three clearly chronological phases. The role of high-injection induced by femtosecond laser effects on the evolving spatiotemporal response was discussed. The results indicate that the space-charge screening effects lead to three clearly separable collection phases with ambipolar diffusion primarily determining the length of the induced transient response signal. Increased femtosecond laser pulse energy levels would further elongate the transient length which would severely degrade the performance of photodetector especially in the high speed signal detection.