为了提高紫外成像器件的填充因子,解决凝视型高性能紫外成像器件的核心技术问题,根据标量衍射理论设计了用于128×128日盲型紫外成像器件的微透镜阵列,其工作中心波长为350 nm,单元透镜F数为3.56。采用组合多层镀膜与剥离的工艺方法制备衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为86%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列的整体性能满足了微透镜阵列与紫外成像阵列的单片集成要求。

In order to enhance fill factor of ultraviolet image forming device, and resolve key technology issues for ultraviolet image forming device, diffractive microlens arrays were designed using scalar diffraction theory for 128×128 solar-blind UV photodetectors. The working center wavelength is 350 nm, the lens F number is 3.56. The microlens arrays were fabricated by the combination of multi-coating and stripping technique, the practical processes and fabrication errors were discussed, and the optical characteristics of diffractive microlens arrays were measured. Experimental results show that the diffraction efficiency of the diffractive microlens array is around 86%, which has a little deviation from the theoretical value 95%. The fabrication errors are from alignment error and the line width error. The whole performance of ultraviolet diffractive microlens array can meet the requirements of the microlens array monolithic integration with ultraviolet image forming device.