密度测量在现代生产生活中占有很重要的地位,因此研究出能够快速精确测量密度的方法会极大地改善生活和生产质量。现利用聚偏氟乙烯(PVDF)压电薄膜的压电效应和逆压电效应制成薄膜压电式谐振传感器,用于气体或液体的密度测量,从而得出传感器谐振频率与被测气体和液体密度之间存在的关系。从实验和分析结果看,该谐振传感器可用于气体或液体的密度测量,且测量结果具有较高的分辨力。

Density measurement plays a very important role in modern life and production. A faster and more accurate way of measuring density will greatly improve the quality of our daily life and production. With this aim, a thin-film piezoelectric resonator sensor made of polyvinylidene fluoride (PVDF) films and based on the piezoelectric effect and inverse piezoelectric effect is designed in measuring the density of gas or liquid. The relationship between the measured fluid and the resonance frequency of the sensor is derived. The experiment results indicate that the sensor can be used for measuring the desity of gas or liquid with a high resolution as a result of digital output.