在激光扫描系统中f-θ透镜是重要的必不可少的部件,它在激光打标机、传真机、印刷机和用于制作半导体集成电路的激光图形发生器以及激光扫描精密计量设备等等光电系统中得到广泛的应用。文中设计了用于非接触在线检测工件尺寸的f-θ透镜。这种透镜的特点是一种负畸变透镜,属于像方远心光路,工作波长为单色光,像质要求波像差要小于λ/4,而且要求整个像面成平面且像质一致,无渐晕存在。所设计的f-θ透镜结构简单紧凑、焦距小、扫描精度高、加工成本较低,性能达到衍射极限,并具有像面上照度分布均匀,能量集中度高和相对畸变小等优点。

f-θ lens is one of the most important parts of laser scanning system, and has been widely used in many equipments, such as laser marking machine, faxes, laser printer, laser pattern generator for semiconductor integrated circuit, laser scanning in the precision meter equipment and so on. An f-θ lens of laser scanning in non-contact is designed. The lens, besides having negative distortion, belonging to far center ray in image space, imaging with homogeneous light, with the requirement of the image quality for wavefront less than λ/4, also requires that the image quality in the whole image surface should be consistent, and the image surface should be plane with no vignetting. The designed lenses are simple、compact, its focus is short and their cost are low with high precision. The focusing performances are within diffraction limit, the relative illuminations quite uniform and the distortion relative to the f-θ linear relation small.