Chinese Optics Letters, 2013, 11 (2): 022401, Published Online: Dec. 20, 2012  

Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides Download: 723次

Author Affiliations
Abstract
Surface-plasmon (SP) enhancement of amorphous-silicon-nitride (a-SiNx) light emission with single-layer gold (Au) waveguides is experimentally demonstrated through time-resolved photoluminescence measurement. The a-SiNx active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and the Au waveguide on the top of the a-SiNx layer is fabricated by magnetron sputtering. The maximum Purcell factor value of ~3 is achieved with identified SP resonance of the Au waveguide at ~530 nm.

Keyong Chen, Xue Feng, Yidong Huang. Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides[J]. Chinese Optics Letters, 2013, 11(2): 022401.

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