中国激光, 2012, 39 (s2): s208004, 网络出版: 2012-12-24
基于法布里珀罗腔的光纤瓦斯传感测量实验研究
Optical Fiber Methane Gas Sensor Based on Fabry-Perot Cavity
测量 光纤传感器 笼形分子A 法布里珀罗腔 干涉 measurement optical fiber sensor cryptophane A Fabry-Perot cavity interference
摘要
研究了基于法布里珀罗(F-P)腔的干涉光纤瓦斯传感系统。利用微电子机械系统(MEMS)技术在硅片上制作含笼形分子A的聚合物,然后与光纤端面构成F-P腔。 基于笼形分子A的聚合物对瓦斯吸收和敏感的特性,通过分析干涉波长峰值的变化,获得浓度与波长的关系。从理论上分析了传感机理和通过瓦斯传感实验评价传感性能,以瓦斯气体样品验证其有效性。测量并对数据分析处理,解调出包含在干涉信号中的信息。实验结果表明,该传感器具有高的灵敏度和可靠性,并且该传感器具有较快的响应时间。
Abstract
Based on Fabry-Perot (F-P) cavity interference, the fiber methane gas sensor system is studied. The micro-electromechanical systems (MEMS) technology is used to cladded cryptophane A polymer onto silicon-piece. The end faces of fiber constitute a F-P cavity. Based on the absorption of methane and gas-sensitive properties of cryptophane A polymer, by analyzing the interference peak wavelength changes, the relationship between concentration and wavelength is obtained. Sensing mechanism is analyzed theoretically and by sensing performance is evaluated by methane gas sensing experiment the validity of the methane gas is verified by methane gas samples. By measuring and analyzing data the information included in the interference signal is demodulated. The results show that, the sensor has high sensitivity and reliability, and the response time is faster.
闫海涛, 赵晓艳, 郝辉, 甄志强, 张智, 李慧娟, 韩道福, 王鸣. 基于法布里珀罗腔的光纤瓦斯传感测量实验研究[J]. 中国激光, 2012, 39(s2): s208004. Yan Haitao, Zhao Xiaoyan, Hao Hui, Zhen Zhiqiang, Zhang Zhi, Li Huijuan, Han Daofu, Wang Ming. Optical Fiber Methane Gas Sensor Based on Fabry-Perot Cavity[J]. Chinese Journal of Lasers, 2012, 39(s2): s208004.