光学 精密工程, 2012, 20 (12): 2696, 网络出版: 2013-01-07  

柔性MEMS减阻蒙皮设计及其制作工艺

Design and fabrication of flexible MEMS anti-drag skin
李勇 1,2,*李文平 1,2朱效谷 1,2
作者单位
1 清华大学 精密仪器与机械学系, 北京 100084
2 清华大学 摩擦学国家重点实验室, 北京 100084
摘要
提出了一种电解水式驻留微气泡减阻的柔性微机电系统(MEMS)蒙皮技术, 研究了蒙皮结构设计以及加工工艺。设计了一种包含柔性基底层、金属电极图案层和微凹坑阵列层的三层式蒙皮结构, 提出了两种基于MEMS工艺的制作方法。分别采用聚二甲基硅氧烷(PDMS)和SU-8胶材料制作了微凹坑阵列层, 并对其关键工序进行了实验研究。以SU-8胶为微凹坑阵列材料制作了柔性MEMS蒙皮样件。所制样件中, 圆柱形驻气凹坑的直径为40 μm、深度为50 μm、密度为6.25×104/cm2、样件总厚度为90 μm, 可弯曲并贴附于截面直径为28 mm的圆柱体表面而不损坏。结果显示了MEMS减阻蒙皮工艺的可行性, 证明将电解水式驻留微气泡的柔性减阻蒙皮设计与MEMS工艺有机结合, 是一种航行体表面减阻的有效技术途径。
Abstract
A novel flexible Microelectromechanical System(MEMS) anti-drag skin was proposed based on the drag reduction with lingering-micro-bubble generated by electrolysis, and the fabrication of flexible MEMS anti-drag skin was designed. The MEMS skin composed of a flexible substrate layer, a metal electrode layer and a micro-well-array layer was designed,and two process routes based on MEMS were developed for the skin fabrication.Then,the polydimethylsiloxane(PDMS) and SU-8 were used to fabricate the micro-well-array layer, respectively. Several key steps in these processes were studied and a specimen was fabricated using SU-8. The specimen has a thickness of 90 μm and contains 6.25×104 cylindrical wells with a depth of 50 μm and a diameter of 40 μm per square centimeter. It can be bent and attached on a Φ28 mm cylinder without damage. Results demonstrate that the MEMS is feasible to realize the anti-drag skin and the flexible MEMS anti-drag skin offers a novel way to reduce the skin friction of vehicles in water.

李勇, 李文平, 朱效谷. 柔性MEMS减阻蒙皮设计及其制作工艺[J]. 光学 精密工程, 2012, 20(12): 2696. LI Yong, LI Wen-ping, ZHU Xiao-gu. Design and fabrication of flexible MEMS anti-drag skin[J]. Optics and Precision Engineering, 2012, 20(12): 2696.

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