针对能量色散X荧光分析(EDXRF)技术中元素间效应实验研究的难点问题，采用蒙特卡罗方法对基于Si(PIN)探测器的EDXRF系统建立模拟模型，并对模拟微束软X射线注量谱建立了高斯展宽算法。对Fe-Ni样品进行模拟计算，表明经该算法展宽后的注量谱与实测Kα系特征X射线谱吻合度较高，并得到了各元素特征X射线归一计数与元素含量关系曲线，结果表明该方法可自行校正EDXRF中元素间效应，获得准确的元素Kα系特征X射线谱理论强度。

In energy dispersive X-ray fluorescence (EDXRF) techniques, the inter-element effect can influence the analysis accuracy seriously. The Monte Carlo simulation method was adopted to simulate the Si(PIN) detector based EDXRF system, and a new Gaussian broadening algorithm was established for the flux spectrum. As compared with the experiment energy spectra of Fe and Ni, the flux spectrum after broadening fits the Kα characteristic X-ray spectrum much better. The relationship curve between normalized count and content of each element is obtained. Results show that this method can correct inter-element effect automatically and provide theoretical intensity of the Kα line characteristic X-ray spectrum.