现代显示, 2012, 23 (11): 34, 网络出版: 2013-01-08
ODF真空贴合系统研究
Research on ODF Vacuum Align System
摘要
文章介绍了TFT-LCD生产中,液晶滴下(One Drop Filling,ODF)所涉及真空贴合系统(Vacuum Align System,VAS)的结构及其发展情况,概述了VAS的工艺过程,重点介绍了该系统中真空单元、基板吸附单元和基板对位单元及其发展。
Abstract
This paper showed the research and development of Vacuum Assembly System (VAS) in ODF process. Introduced the process of VAS and discussed the vacuum system, chuck system, precise alignment system and the development direction.
刘亮, 杨国波, 赵德友, 王永茂, 于翔, 龚娟. ODF真空贴合系统研究[J]. 现代显示, 2012, 23(11): 34. LIU Liang, YANG Guo-bo, ZHAO De-you, WANG Yong-mao, YU Xiang, GONG Juan. Research on ODF Vacuum Align System[J]. ADVANCED DISPLAY, 2012, 23(11): 34.