首先,简述红外光电探测器的发展历史以及分类,可分为室温探测器和低温探测器。然后对每种探测器所使用的 材料进行了介绍,室温探测器介绍了氧化钒、无定型硅,低温探测器介绍了碲镉汞(HgCdTe)、量子阱和锡化 物超晶格,以及它们在三代红外光电探测器方面的研究进展。最后,介绍了黑硅材料以及黑硅在探测器应用中的最新进展。

Firstly, the history and types of infrared detector are shown, including room tempreture and low temperture infrared detector. Second, the material for every kind of infrared detector are analyzed, including VOx, a-Si for room tempreture detector and HgCdTe, QWIP, Tin iodide superlattice for low tempreture detector. Finally, black silicon for infrared detector is introduced.