光学学报, 2003, 23 (s1): 835, 网络出版: 2013-01-28  

The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution

The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution
作者单位
1 Metrology Technique Engineering College, China Institute of Metrology, Hang Zhou, P. R. China
2 Information Engineering College, China Institute of Metrology, Hang Zhou, P. R. China
摘要
Abstract
The method rising measuring resolution through reducing pitch of the transducer has brought forward from the basic structure, principle and the corresponding relationship among pitches of capacitive electrodes, period T and phase shift of v0(a:,/) . But if the traditional technique of PCB made of the transducer is still used, it will meet with difficulties in lead wire. And so the technology transplant from the transducer to grating is presented, the basic principle of the phase modulation grating similar to the transducer is described and the experiments setup of transmitted and reflective grating are put out. Some practical schemes of the new grating with resolution to sub-micron, even nm is given.

Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. 光学学报, 2003, 23(s1): 835. Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. Acta Optica Sinica, 2003, 23(s1): 835.

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