中国激光, 2004, 31 (s1): 329, 网络出版: 2013-01-29
界面结合强度激光划痕测量新方法
New Method of Laser Scratching to Determine the Bond Strength of the Film-Substrate Interface
摘要
薄膜-基体界面结合性能是直接关系到膜基体系最终使用性能和可靠性的关键因素和首要指标.在分析界面结合强度划痕试验法和激光层裂法的研究与应用现状的基础上,提出了界面结合强度红外激光划痕和远紫外线激光划痕测量新方法,并分析了其技术优势.最后研究了激光划痕机理和相关的界面结合状态诊析技术.
Abstract
The bond strength of film-substrate interface is often the predominant factor and chiefly target in determining the performance and reliability of film-substrate system. A new method of infared and deep UV radiation laser scratch testing technique is presented in the article to determine the bond strength of film-substrate interface. The laser scratching mechanism and diagnosis technology of the bonding state of the film-substrate interface are studied on the bases of analyzing the technological advantages of the laser scratching technique.
冯爱新, 张永康, 谢华锟, 周明, 蔡兰. 界面结合强度激光划痕测量新方法[J]. 中国激光, 2004, 31(s1): 329. FENG Ai-xin, ZHANG Yong-kang, XIE Hua-kun, ZHOU Ming, CAI Lan. New Method of Laser Scratching to Determine the Bond Strength of the Film-Substrate Interface[J]. Chinese Journal of Lasers, 2004, 31(s1): 329.
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