为满足高功率激光抽运中氙灯及其防护隔板玻璃宽谱增透的要求,采用提拉镀膜法在K9基片上通过溶胶-凝胶工艺镀制有机硅-SiO2双层宽谱增透膜系.在实验的基础上讨论了有机硅-SiO2双层膜系中膜厚的搭配以及膜系的宽谱增透特性.实验研究表明通过合理的膜层搭配和对镀膜参量的有效调控,有机硅-SiO2双层宽谱增透膜系在376～927nm连续波段内具有透射率大于98%的增透效果,激光损伤阈值大于20J/cm2(1064nm,4ns),且性能稳定,完全满足氙灯及其防护隔板上宽谱增透膜的要求.

A two-layer broadband antireflective (AR) film by sol-gel dip-coating process on K9 substrate for high power lasers was investigated which consists of a layer of methyl silicone polymer overcoated with porous silica The performance of two-layer film was changed little by dip and spin coating.The experimental result showed, when the physical thicknesses of silicone film and SiO2 AR film were suited and seemly, the two-layer AR film can be developed with transmission greater than 98% at the waveband range from 400 to 900 nm, of which damage threshold was over 20 J/cm2( 1064 nm, 4 ns).