光学学报, 2013, 33 (3): 0312003, 网络出版: 2013-02-06
基于载频交叠重构干涉术的大口径干涉仪相移误差校正方法
Method Based on Carrier Squeezing Interferometry for Suppressing Phase Errors from Inaccurate Phase Shift in a Φ600 Fizeau Interferometer
测量 光学测量 波长调谐移相技术 Φ600干涉仪 相移误差 measurement optical measurement wavelength tuning phase-shifting technique Φ600 Fizeau interferometer inaccurate phase shift
摘要
为抑制Φ600 mm相移式菲佐干涉仪中波长调谐误差以及振动带来的测量误差,提出了一种可用于波长调谐移相干涉仪的误差校正方法。将4幅载频干涉图按列交叠重构得到时空条纹图,由于载频的存在实现了误差谱与相位谱的分离,提取相位谱就可以正确解包相位。存在波长调谐误差和振动的情况下,仿真结果表明利用载频交叠重构干涉术,相位恢复精度是传统移相算法精度的10倍以上;实验结果显示,载频交叠重构干涉术的测量精度为0.0066λ。利用载频交叠重构干涉术能够有效抑制Φ600干涉仪中波长调谐误差与振动造成的测量误差。
Abstract
A method using in a phase-shifting Φ600 Fizeau interferometer is proposed to suppress phase errors from inaccurate wavelength increment and vibration. The data of four interferograms are reconstructed by column and combined to a single spatial-temporal fringes (STF) image. In the spectrum of the STF, the phase lobe and error lobe are separated by introducing linear carrier into original interferograms. The component related to phase distribution can be selected by filtering and the phase can be reconstructed accurately. Considering vibration and inaccurate wavelength increment, the simulation result indicates that the accuracy using this method is 10 times of that using traditional phase shifting-algorithm. Its validation is verified by experiments, where an accuracy of 0.0066λ is obtained. This method can be used to realize suppression of phase errors from inaccurate wavelength increment and vibration in a Φ600 Fizeau interferometer.
李金鹏, 陈磊, 李博, 朱荣刚, 李建欣. 基于载频交叠重构干涉术的大口径干涉仪相移误差校正方法[J]. 光学学报, 2013, 33(3): 0312003. Li Jinpeng, Chen Lei, Li Bo, Zhu Ronggang, Li Jianxin. Method Based on Carrier Squeezing Interferometry for Suppressing Phase Errors from Inaccurate Phase Shift in a Φ600 Fizeau Interferometer[J]. Acta Optica Sinica, 2013, 33(3): 0312003.