利用2kW CO2激光器作为激光照射源,采用测量精度为±0.03 μm的Twyman-Green干涉仪、CCD摄像技术、计算机数据采集与处理系统, 对普通硅镜和相变致冷硅镜在强光照射下不同时刻的热变形进行了实时对比测量,得到了在不同激光照射时间下镜面热变形的干涉条纹序列图以及热变形量随激光照射时间的变化实验曲线。

By utilizing of 2 kW CQ2 laser as a laser source, a Twyman-Green's interferometer, CCD photography technology, and a computer data collection and procession system, the thermal deformations of two types of mirrors have been measured, respectively. The experimental results show that the thermal deformations of the phase-change-cooled mirrors are smaller than those of general silicon mirrors, and that the initial thermal distortions of the mirror surface increase greatly with increasing of laser irradiation time; after about two seconds, the thermal distortions increase slowly. The thermal deformation interferogranis of the mirrors at different times are obtained.