中国激光, 2002, 29 (s1): 500, 网络出版: 2013-02-23
光学薄膜淀积监控方法研究
Study on Optical Thin Film Deposition Monitoring Method
摘要
提出了一种新型的极值法监控薄膜淀积层厚精度的方法。该方法通过设计和调整监控波长, 改变各层膜的反射率极值过正量而将被镀膜层精确地停镀于对膜厚变化敏感的设计值。运用这一方法可以提高淀积规整膜系的层厚监控精度。
Abstract
A new method of turn-point-value monitoring is provided in this paper. Deposition is stopped at a point which is senstative to film depth variation by designing and modulating monitoring wavelength. This method can be used to improve deposition monitoring accuracy.
杨明红, 刘劲松, 陈清明. 光学薄膜淀积监控方法研究[J]. 中国激光, 2002, 29(s1): 500. YANG Ming-hong, LIU Jin-song, CHEN Qing-ming. Study on Optical Thin Film Deposition Monitoring Method[J]. Chinese Journal of Lasers, 2002, 29(s1): 500.
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