中国激光, 2002, 29 (s1): 575, 网络出版: 2013-02-23
准分子激光精密加工陶瓷、玻璃等硬脆材料的研究
Study on Precision Machining Ceramics and Glass by Excimer Laser
摘要
采用波长248 nm的KrF准分子激光器,对Al2O3陶瓷片及玻璃片的精密加工进行了研究,探讨了各种工艺参数对加工质量的影响规律。同时研究了激光工艺参数对材料表面粗糙度的影响, 并且对加工后工件的表面形貌进行了分析。
Abstract
In this paper, the process studying of precision machining ceramics tile and glass tile with KrF (λ= 248 nm) excimer laser were carried out, the effects of processing parameters on quality of precision machining were studied. The effect of laser parameters on surface roughness of workpieces were studied too. The surface topography of machined workpiece was analyzed.
江超, 胡少六, 王又青, 李波, 龙华, 敖育红. 准分子激光精密加工陶瓷、玻璃等硬脆材料的研究[J]. 中国激光, 2002, 29(s1): 575. JIANG Chao, HU Shao-liu, WANG You-qing, LI Bo, LONG Hua, Ao Yu-hong. Study on Precision Machining Ceramics and Glass by Excimer Laser[J]. Chinese Journal of Lasers, 2002, 29(s1): 575.
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