利用传输矩阵理论对无光学损耗和有光学损耗的分布布拉格反射镜(Distributed Bragg reflector,DBR)分别进行了结构分析与优化。在光场正入射条件下, 对具有HL、HLH、LH及LHL结构的DBR内部光场分布情况进行了模拟分析和实验验证。结果表明: 光场正入射到DBR后, 在HL及HLH型DBR结构内部的光场分布最弱。当组成DBR的材料层消光系数为0.01时, HL及HLH型DBR内部产生的能流密度吸收量最小, 为其他结构的10%左右, 材料吸收引起的中心波长反射率降低仅为3.6%; 而LH及LHL型DBR结构由于材料吸收而导致反射率降低29.2%。因此, 采用高折射率材料层作为DBR结构的第一层有利于提高DBR反射率, 降低光学吸收。最后, 通过MOCVD外延生长了具有HL结构的吸收型Al0.12Ga0.88As/Al0.9Ga0.1As DBR结构, 并对其反射特性进行了测试。

The optical analysis of the lossless and lossy distributed Bragg reflector (DBR) structure using the transfer matrix method was reported. For DBR structures with different configurations of HL, HLH, LH and LHL, the optical field distributions were gained from the simulation. The theoretical analysis showed that the level of optical field amplitude within HL and HLH structure was much lower than other structures. For the extinction coefficient of 0.01, the energy absorption in HL and HLH DBR structures was only 10% of the one within LH and LHL structures. Due to the optical absorption, the reflectivity at the central wavelength of HL and HLH DBR structures decreased by 3.6%, comparing with 29.2% for LH and LHL structures. Thus, the reflectivity of DBR could be increased if the high index layer was used as the first layer, and the optical absorption could be decreased by this method. At last, the lossy DBR consisted of Al0.12Ga0.88As/Al0.9Ga0.1As was grown and its reflectivity was measured.