设计了一种基于双柔性支承板的快速伺服刀架用于金刚石车削加工非回转对称微结构表面, 并对其性能进行了测试。根据约束条件推导了刀架柔性支承板的刚度解析表达式, 同时给出了柔性板上最大Von Mises应力的计算公式。根据快速伺服刀架设计指标, 优化了柔性支承板的结构参数, 并根据上述结构参数, 加工得到了快速伺服刀架。最后, 搭建了快速伺服刀架控制系统, 测试了它的静态及动态特性。测试结果表明, 设计的快速伺服刀架的刚度为53 N/μm, 最小运动分辨率为3 nm, 工作行程可达20 μm。另外, 它的稳态跟踪误差小于4 nm, 开环带宽为2 kHz, 一阶固有频率可达3 kHz。测试结果不仅验证了所述设计方法的正确性, 也表明采用双柔性支承板结构是设计高刚度、高精度微位移机构的一种有效方法。

A double elastic plate based Fast Tool Servo (FTS) was designed to fabricate non-rotational symmetrical micro-structured surfaces using diamond turning method. Then, the performance of the FTS was tested. According to constrain conditions, the analytical expression for the stiffness of elastic plates was derived and the calculation method for the maximum Von Mises stress of the plates was also given. Based on the specification of the FTS, the structural parameters of the elastic plates were optimized and a FTS was machined in accordance with the parameters mentioned above. Finally, a control system for the FTS was established, and the static and dynamic characters were tested. The test results show that the stiffness of the FTS is 53 N/μm, the motion resolution is 3 nm, and the travel range can reach to 20 μm. Furthermore, the FTS can offer the static following error better than 4 nm, the open loop bandwidth of 2 kHz and the fundamental frequency up to 3 kHz. The test results not only demonstrate the correctness of the design method, but also indicate that the double elastic plate based structure is a good choice for the micro-displacement units with high stiffness and high precision.