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Ultrafast laser ablation size and recast adjustment in dielectrics based on electron dynamics control by pulse train shaping

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Abstract

The manipulation of the subpulse number, pulse delay, and pulse energy distribution of an ultrafast laser enables electron dynamics control by changing absorptions, excitations, ionizations, and recombinations of electrons, which can result in smaller, cleaner, and more controllable structures. This letter experimentally reveals that ablation sizes and recasts can be controlled by shaping femtosecond pulse trains to adjust transient localized electron dynamics, material properties, and corresponding phase change mechanisms.

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DOI:10.3788/col201311.041403

所属栏目:Lasers and laser optics

责任编辑:张雁

收稿日期:2012-12-12

录用日期:2012-12-25

网络出版日期:2013-03-20

联系人作者:联系作者(jianglan@bit.edu.cn)

备注:This work was supported by the National "973" Program of China (No. 2011CB013000) and the National Natural Science Foundation of China (Nos. 90923039 and 51025521).

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引用该论文

Chuancai Xu, Lan Jiang, Ni Leng, Yanping Yuan, Pengjun Liu, Cong Wang, Yongfeng Lu, "Ultrafast laser ablation size and recast adjustment in dielectrics based on electron dynamics control by pulse train shaping," Chinese Optics Letters 11(4), 041403 (2013)

被引情况

【1】. Temporal characteristic analysis of stepped pulse on hohlraum wall. Chinese Optics Letters, 2014, 12(4): 42602-42606

【2】Juqiang Fang,Lan Jiang,Qiang Cao,Yanping Yuan,Liangti Qu,Ji'an Duan,Yongfeng Lu. Doping transition metal ions as a method for enhancement of ablation rate in femtosecond laser irradiation of silicate glass. Chinese Optics Letters, 2014, 12(12): 121402-121406

【3】Guangming Zhang,Xin Li,Lan Jiang,Xuesong Shi,Kaihu Zhang,Qiang Cao,Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses. Chinese Optics Letters, 2015, 13(4): 41402-41405

【4】Zhi Luo,Ji'an Duan (段吉安),Cong Wang,Xiaoyan Sun,Kai Yin. Resonant ablation rules of femtosecond laser on Pr–Nd doped silicate glass. Chinese Optics Letters, 2015, 13(5): 51403-51406

【5】Tingzhong Zhang,Xiaowu Ni,Jian Lu. Modeling of dynamic process in the laser-off period during laser drilling. Chinese Optics Letters, 2015, 13(8): 81403-81406

CrossRef返回数据

【1】Lan Jiang, Juqiang Fang, Qiang Cao, Kaihu Zhang, Peng Wang, Yanwu Yu, Qiang Huang, Yongfeng Lu. Femtosecond laser high-efficiency drilling of high-aspect-ratio microholes based on free-electron-density adjustments. Applied Optics, 2014, 53(31): 7290 

【2】Jun Xie, Feng Wang, Lan Jiang, Liangliang Zhao, Yongfeng Lu. Periodic surface structures induced by femtosecond laser single pulse and pulse trains on metals. Laser Physics, 2015, 25(5): 056103 

【3】Zhou Fang, Yuan’an Zhao, Jianda Shao. Femtosecond laser-induced periodic surface structure on fused silica surface. Optik, 2016, 127(3): 1171 

【4】Jiang Cen, Qiuhong Yang, Yuan Ye, Qing Lu, Shenzhou Lu. XAFS study of the local structure of (Yb0.03Sc0.97−xYx)2O3 transparent ceramics. Journal of Alloys and Compounds, 2014, 586(): 512 

【5】Lan Jiang, An-Dong Wang, Bo Li, Tian-Hong Cui, Yong-Feng Lu. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light: Science & Applications, 2018, 7(2): 17134

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