Chinese Optics Letters, 2013, 11 (4): 041403, Published Online: Mar. 19, 2013
Ultrafast laser ablation size and recast adjustment in dielectrics based on electron dynamics control by pulse train shaping Download: 796次
140.3390 Laser materials processing 320.7130 Ultrafast processes in condensed matter, including semiconductors 320.5540 Pulse shaping
Abstract
The manipulation of the subpulse number, pulse delay, and pulse energy distribution of an ultrafast laser enables electron dynamics control by changing absorptions, excitations, ionizations, and recombinations of electrons, which can result in smaller, cleaner, and more controllable structures. This letter experimentally reveals that ablation sizes and recasts can be controlled by shaping femtosecond pulse trains to adjust transient localized electron dynamics, material properties, and corresponding phase change mechanisms.
Chuancai Xu, Lan Jiang, Ni Leng, Yanping Yuan, Pengjun Liu, Cong Wang, Yongfeng Lu. Ultrafast laser ablation size and recast adjustment in dielectrics based on electron dynamics control by pulse train shaping[J]. Chinese Optics Letters, 2013, 11(4): 041403.