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基于激光干涉仪的衍射光栅波前检测

Wavefront Measurement of Diffraction Grating Based on Laser Interferometer

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摘要

以往检测衍射光栅波前时,需自行搭建检测光路,且搭建过程中由于元件较多,造成系统精度难以保证,得到的测量结果不够理想。针对这些问题,本文提出基于 GPITMXP/DX型 ZYGO干涉仪搭建检测光路,并对平面衍射光栅及凹面衍射光栅的衍射波前进行了检测,得到参考光与衍射光的干涉条纹及相关信息,拓展了 ZYGO干涉仪的用途。利用传统的干涉检测法,检测时,干涉仪与标准透镜及反射镜配合使用,标准镜精度接近 λ/40,干涉腔精度为 λ/20。检测得到平面光栅一级衍射光与参考光的干涉条纹及光栅的衍射波前,分析比较了两种检测凹面光栅的方法。与以往检测光栅波前装置相比,本文提出的测量装置精度高、安装简单,不需要搭建专门的波前检测装置,便于重复测量,得到的结果可靠性高。

Abstract

Former method to detect the wavefront of diffraction grating was based on special system .It is hard to avoid errors caused during setting up optical system because so many devices are used. In this work, the measurement system based on ZYGO GPI. XP/DX interferometer detect the wavefront of plane grating and concave grating, which expanded the applications of ZYGO interferometer. The principle of the system is traditional interference method. ZYGO interferometer is used in concert with standard lens and mirrors as reference device. The precision of reference devices approach λ/40 and the precision of interfere cavity is λ/20. The ±1 order diffraction wavefront and its interference fringe of plane grating are gotten. Two kinds of testing concave grating wavefront were compared. Analysis shows that the new design is simpler and easier to set up compared to past devices.

Newport宣传-MKS新实验室计划
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中图分类号:O453.2;TB22

DOI:10.3969/j.issn.1003-501x.2013.03.011

所属栏目:光电测量与检测

基金项目:国家自然科学基金 (60908021);国家科技支撑计划 (2011BAF02804);国家重大科学仪器设备开发专项 (2011YQ15004);上海市重点学科项目第三期 (S30502);上海市研发公共服务平台 (11DZ2290300)

收稿日期:2012-09-29

修改稿日期:2012-12-31

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钱林勇:上海市现代光学系统重点实验室,教育部光学仪器与系统工程中心上海理工大学光电信息与计算机工程学院,上海 200093
黄元申:上海市现代光学系统重点实验室,教育部光学仪器与系统工程中心上海理工大学光电信息与计算机工程学院,上海 200093
张大伟:上海市现代光学系统重点实验室,教育部光学仪器与系统工程中心上海理工大学光电信息与计算机工程学院,上海 200093
倪争技:上海市现代光学系统重点实验室,教育部光学仪器与系统工程中心上海理工大学光电信息与计算机工程学院,上海 200093
庄松林:上海市现代光学系统重点实验室,教育部光学仪器与系统工程中心上海理工大学光电信息与计算机工程学院,上海 200093

联系人作者:钱林勇(Leonqly@126.com)

备注:钱林勇(1987-),男(汉族),江苏连云港人。硕士,从事光学检测及衍射光栅设计的研究。

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引用该论文

QIAN Linyong,HUANG Yuanshen,ZHANG Dawei,NI Zhengji,ZHUANG Songlin. Wavefront Measurement of Diffraction Grating Based on Laser Interferometer[J]. Opto-Electronic Engineering, 2013, 40(3): 67-74

钱林勇,黄元申,张大伟,倪争技,庄松林. 基于激光干涉仪的衍射光栅波前检测[J]. 光电工程, 2013, 40(3): 67-74

被引情况

【1】丁卫涛,黄元申,张大伟,杨海马. 中阶梯光栅刻划误差要求分析. 光电工程, 2013, 40(9): 68-75

【2】洪少欣,张梦华,郑继红. 用于平视显示中全息光栅的光学性能全自动检测. 光电工程, 2014, 41(8): 40-44

【3】张森,张军伟,周忆,王逍,邓波,粟敬钦,胡东霞. 波前畸变对光栅压缩器输出激光脉冲的时空特性影响. 中国激光, 2018, 45(4): 401011--1

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