首页 > 论文 > 光电工程 > 40卷 > 3期(pp:146-150)

金属网格与金属谐振环复合结构的 太赫兹透过特性

Hybrid Terahertz Metamaterials by Assembling a Split Ring Resonator with a Metal Mesh

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

本文根据 SOI(Silicon-on-insulator)材料在太赫兹波段不透过太赫兹的特点,提出一种加工基于微机电系统 (MEMS)可调谐太赫兹器件的新方案,并设计出与梳齿驱动加工工艺十分兼容的金属结构。此结构由金属网格和金属谐振环阵列复合构成,静态的测试表明结构在太赫兹波段显出带通滤波的特性,通过改变两个元件之间的位置,能够实现 0.41~0.53 THz带通调谐。此结构加工方法简单,加工过程中只需要一块掩膜版,并且金属结构在 MEMS梳齿结构释放之前就已经光刻形成,不需要两个图形的对准工艺,同时也避免了后续光刻对加工好 MEMS梳齿结构的破坏。金属网格和金属谐振环构成的复合结构为微机电系统(MEMS)可调谐太赫兹器件提供了一种简单经济的加工方案和新的结构,具有较大的理论价值和实际意义。

Abstract

We propose a novel metamaterial structure process according to the transmission property of the Silicon-on-insulator (SOI) wafer. We also suggest an appropriate structure for the Micro-electro-mechanical System (MEMS) technique to achieve larger frequency modulation. This structure was assembled by a Split Ring Resonator (SRR) with a metal mesh within a unit cell. Our experimental studies on the composite structure indicate that the coupling of the metal mesh and the SRR significantly contribute to transparency at the terahertz range. Moreover, we experimentally demonstrated the performance of this structure by changing the relative positions of the SRR and the metal mesh. The unique resonance characteristics of this composite structure make it an excellent candidate for developing tunable terahertz components via integration with the MEMS technology

广告组1 - 空间光调制器+DMD
补充资料

中图分类号:TN215

DOI:10.3969/j.issn.1003-501x.2013.03.023

所属栏目:光电器件与系统

基金项目:国家自然科学基金委员会和中国工程物理研究院联合基金 (11176033);北京市自然科学基金 (4102016)资助项目

收稿日期:2012-11-29

修改稿日期:2012-12-28

网络出版日期:--

作者单位    点击查看

熊伟:中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都 610209电子科技大学光电信息学院,成都 610054
姚军:中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都 610209
李伟:电子科技大学光电信息学院,成都 610054
沈京玲:首都师范大学物理系,北京 100048

联系人作者:熊伟(vanxiong@163.com)

备注:熊伟(1983-),男(汉族),湖南长沙人。博士研究生,主要从事微细加工及 THz无源器件的研究工作。

【1】LU Xingchao,HAN Jiaguang,ZHANG Weili. Resonant terahertz reflection of periodic arrays of subwavelength metallic rectangles [J]. Appl Phys Lett(S0003-6951),2008,92:121103.

【2】LU Xingchao,HAN Jiaguang,ZHANG Weili. Transmission field enhancement of terahertz pulses in plasmonic,rectangular coaxial geometries [J]. Opt Lett(S0146-9592),2010,35:904-906.

【3】WU Dongmin,FANG N,SUN Cheng,et al. Terahertz plasmonic high pass filter [J]. Appl Phys Lett(S0003-6951),2003, 83:201.

【4】CHEN Houtong,O''HARA J F,AZAD A K,et al. Experimental demonstration of frequency-agile terahertz metamaterials [J]. Nat Photonics(S1749-4885),2008,2:295-298.

【5】CHEN Houtong,PALIT S,TYLER T,et al. Hybrid metamaterials enable fast electrical modulation of freely propagating terahertz waves [J]. Appl Phys Lett(S0003-6951),2008,93:091117.

【6】KHOO I,WERNER D,LIANG Xiang,et al. Nanosphere dispersed liquid crystals for tunable negative-zero-positive index of refraction in the optical and terahertz regimes [J]. Opt Lett(S0146-9592),2006,31:2592-2594 .

【7】CHEN Houtong,LU Hong,AZAD A K,et al. Electronic control of extraordinary terahertz transmission through subwavelength metal hole arrays [J]. Opt Express(S1094-4087),2008,16:7641-7648.

【8】CHEN Houtong,PADILLA W J,CICH M J,et al. A metamaterial solid-state terahertz phase modulator [J]. Nat Photonics (S1749-4885),2009,3:148-151.

【9】SHEN Nianhai,KAFESAKI M,KOSCHNY T,et al. Broadband blueshift tunable metamaterials and dual-band switches [J]. Phys Rev B (S1098-0121),2009,79:161102.

【10】ZHANG Wei,LIU A Q,ZHU Weimin,et al. Micromachined switchable metamaterial with dual resonance [J]. Appl Phys Lett (S0003-6951),2012,101:151902-151904.

【11】ZHU Wei,CAI Hong,MEI Ting,et al. A MEMS tunable metamaterial filter [C]// Micro Electro Mechanical Systems (MEMS),2010 IEEE 23rd International Conference,WanChai,Hong Kong,Jan 24-28,2010,5:196-199.

引用该论文

XIONG Wei,YAO Jun,LI Wei,SHEN Jingling. Hybrid Terahertz Metamaterials by Assembling a Split Ring Resonator with a Metal Mesh[J]. Opto-Electronic Engineering, 2013, 40(3): 146-150

熊伟,姚军,李伟,沈京玲. 金属网格与金属谐振环复合结构的 太赫兹透过特性[J]. 光电工程, 2013, 40(3): 146-150

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF