为进一步提高共焦元件参数测量系统的定焦精度, 提出了运用高斯滤波算法对由共焦系统采集的光斑图像和共焦轴向强度响应信号进行滤波处理, 以降低系统光学噪声对测量光斑图像的影响, 削弱外界环境扰动等因素对共焦轴向强度响应信号的干扰。经理论分析和实验验证, 在对测量光斑图像和共焦轴向强度响应信号进行高斯滤波算法处理后, 可有效地抑制图像噪声, 降低高次谐波干扰, 进而提高系统的定焦精度。

In order to improve the position precision of the confocal component parameters measurement system, a process data based on Gaussian filtering process is proposed on the disk images collected by the confocal system and confocal axial intensity response signale. The method reduces the optical noise on the disk images, and it weakens the interference of the factors such as environmental perturbations on the confocal axial intensity response signale. The theoretical analyses and preliminary experiments indicate that Gaussian filtering on the disk images and confocal axial intensity response signal can effectively suppress the image noise and reduce the high harmonic interference, thus it improves the system position accuracy.