光学学报, 2013, 33 (4): 0412007, 网络出版: 2013-04-07   

正弦相位调制自混合干涉大范围位移测量精度测试与分析

Testing and Analysis of Large-Range Displacement Measurement Precision in Sinusoidal Phase-Modulating Self-Mixing Interferometer
作者单位
南京师范大学物理科学与技术学院, 江苏省光电技术重点实验室, 江苏 南京 210046
摘要
介绍了正弦相位调制型激光自混合干涉仪位移测量原理、光路搭建和信号处理方法。正弦相位调制由外腔中的电光晶体引入,调制后的自混合干涉信号采用傅里叶分析的方法完成相位解调。这项技术已经应用于纳米精度微位移测量,为了拓展其应用领域,将该技术应用于大范围位移测量。在实验过程中,使用自混合干涉仪和Agilent 5529A校准仪同时对大尺度和小尺度范围内的位移进行测量,通过比较测量结果来检验干涉仪的性能。实验结果表明,在普通的实验室噪声环境中,自混合干涉仪在毫米范围内的位移测量精度在亚微米量级,在微米和纳米范围内的位移测量精度分别可以达到18 nm和7 nm。并分析了位移测量过程中的误差来源,分析结果与实验相符。
Abstract
The displacement measurement theory, the optical path construct and the signal processing method of the sinusoidal phase-modulating self-mixing interferometer are proposed in detail. Phase modulation is introduced by electro-optic crystals in the external cavity and modulated self-mixing interference signal demodulation is achieved by Fourier analysis method. This technique has been used in micro-displacement measurement with nanometer accuracy, which is applied to large range displacement measurement. Agilent 5529A calibrator is included in the displacement measurement both in small and large ranges to evaluate the performance of the interferometer during the experiment. Experimental results show that the range of millimeters displacement is measured at sub-micrometer accuracy and the range of micrometers and nanometer displacement measurement can reach accuracy of 18 nm and 7 nm respectively in the common laboratorial environment. The error source in the measuring process is analyzed, and the results obtained are conformed to that of the experiments.

杨振宇, 王鸣, 夏巍, 郝辉, 郭冬梅. 正弦相位调制自混合干涉大范围位移测量精度测试与分析[J]. 光学学报, 2013, 33(4): 0412007. Yang Zhenyu, Wang Ming, Xia Wei, Hao Hui, Guo Dongmei. Testing and Analysis of Large-Range Displacement Measurement Precision in Sinusoidal Phase-Modulating Self-Mixing Interferometer[J]. Acta Optica Sinica, 2013, 33(4): 0412007.

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