Chinese Optics Letters, 2013, 11 (5): 053003, Published Online: Apr. 16, 2013
Experimental study of Fourier transform spectrometer based on MEMS micro-mirror Download: 869次
Abstract
We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238o. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.
Jianjun Chen, Yong Zhu, Bo Liu, Wei Wei, Ning Wang, Jie Zhang. Experimental study of Fourier transform spectrometer based on MEMS micro-mirror[J]. Chinese Optics Letters, 2013, 11(5): 053003.