采用一种以五次幂函数为基础所设计的1×4光波导功分器路径, 利用中心波长为800 nm、重复频率为75 MHz的飞秒脉冲激光为光源, 通过控制三位电动平移台, 在Z切割铌酸锂晶体进行横向扫描此路径, 在激光功率为270 mW和扫描速度为0.05 mm/s下, 制备出1×4光波导功分器, 分析了改变扫描速度和扫描次数对波导形成的影响, 以及波导形成的原因.实验结果表明: 在强激光的各种参量一定时, 扫描速度越小, 扫描次数越多, 波导线宽越大, 扫描速度在一定范围内时, 波导损耗较低.

This paper reports the experimental research of optical channel waveguides in Z-LiNbO3 crystals by femtosecond pulses. The laser scanning trajectory is controlled by the five power function program. A 1×4 optical splitter was prepared by the horizontal scanning when the pulse energy is 270 mW, the scanning speed from 50 μm to 200 μm per second. The result shows that the scanning speed is slower, and the repeat times are more, the waveguide width is wider.