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高深宽比金属光栅制备及中红外波段传感特性

Fabrication and application of high aspect ratio metallic gratings for sensing in the mid-infrared region

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摘要

利用纳米压印结合溅射和反应离子刻蚀工艺制备了具有高深宽比的金光栅, 使用傅里叶变换红外光谱仪测得了反射谱线.测量结果显示,只在p偏振光垂直于光栅矢量方向入射条件下才存在共振反射峰, 证明了“伪表面等离子体激元波”的存在.基于严格耦合波分析理论计算了金属光栅的反射率, 研究了其作为中红外波段波长调制型表面等离子体共振传感器的可行性.数值计算表明负级次衍射光波对应的共振反射峰的移动能获得较高的波长灵敏度.对于深宽比为10的金光栅结构, +1级次和-3级次衍射光波对应的波长灵敏度分别为1600 nm/RIU和5000 nm/RIU, 品质因子分别为20 RIU-1和60 RIU-1.

Abstract

A method for fabricating high aspect ratio (HAR) metallic gratings using nanoimprint together with sputtering and reactive-ion etching (RIE) was introduced. The reflection spectrum is measured by Fourier transform infrared (FTIR) spectrometer in the mid-infrared (Mid-IR) region. The reflection peaks will appear just when the p-polarized light incident normally to the grating vector direction, which is very similar to the phenomenon of surface plasmon resonance. This is the so-called spoof surface plasmon resonance (SSPR). Theoretical analysis based on rigorous coupled wave showed that spoof surface plasmon resonance is very sensitive to the change of refractive index in the surface of the metal. Thus this phenomenon has its potential use as a refractive index sensor. In addition, the shift of resonance wavelength with the refractive index of the metal surface is completely linear. The refractive index sensitivity of the Mid-IR SPR sensor are predicted to be 1600 nm per refractive index unit (1600 nm/RIU) and 5000 nm/RIU for the positive and negative order diffractive waves, respectively. The corresponding figure of merits of the whole system is predicted to be 20 RIU-1 and 60 RIU-1, respectively. The list of applicable target materials will certainly expand greatly if mid-IR SPR-based sensors are developed.

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中图分类号:O436.1

DOI:10.3724/sp.j.1010.2013.00154

基金项目:国家自然科学基金(209070201);南京信息工程大学青年教师创新培养基金 (20110423)

收稿日期:2012-01-06

修改稿日期:2012-07-03

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作者单位    点击查看

郑改革:南京信息工程大学 物理与光电工程学院 应用物理系 江苏 南京 210044
陈云云:南京信息工程大学 物理与光电工程学院 应用物理系 江苏 南京 210044
徐林华:南京信息工程大学 物理与光电工程学院 应用物理系 江苏 南京 210044
赖敏:南京信息工程大学 物理与光电工程学院 应用物理系 江苏 南京 210044

联系人作者:郑改革(eriot@126.com)

备注:郑改革(1984-), 男, 江苏新沂人, 博士, 讲师, 主要从事纳米光子材料与器件的研究.

【1】BAI Wen-Li, GUO Bao-Shan, CAI Li-Kang, et al. Simulation of light coupling enhancement and localization of transmission field via subwavelength metallic gratings [J]. Acta Phys. Sin.(白文理,郭宝山,蔡利康,等.亚波长金属光栅的光耦合增强效应及透射局域化的模拟研究.物理学报), 2009, 58(11): 8021-8026.

【2】LIU Jing, LIU Juan, WANG Yong-Tian, et al. Resonant properties of sub-wavelength metallic gratings[J]. Chinese Journal of Optics and Applied Optics (刘镜,刘娟,王涌天,等.亚波长金属光栅的表面等离子体激元共振特性.中国光学), 2011, 4(4):363-368.

【3】Davis J A, Garrett H E. Polarizing binary diffraction grating beam splitter [J]. Opt. Lett., 2004, 29(13): 1443-1445.

【4】CAO Zhao-Liang, LU Zhen-Wu, ZHANG Ping, et al. Fabrication of 30μm subwavelength refractive gratings in infrared region[J]. J.Infrared Millim.Waves (曹召良,卢振武,张平,等.红外30 μm亚波长抗反射光栅的制作.红外与毫米波学报) 2004, 23(1): 6-10.

【5】MA Wei-Tao, ZHOU Jun, HUANG Shui-Ping, et al. Characteristic of subwavelength dielectric grating with metal layer and its sensing applications[J]. Chinese Journal of Lasers (马伟涛, 周骏, 黄水平, 等.金属膜衬底上亚波长介质光栅结构的特性及传感应用.中国激光) 2011, 38(9):0905008.

【6】Wu B, Wang Q. High sensitivity transmission-type SPR sensor by using metallic-dielectric mixed gratings [J]. Chin. Phys. Lett.,2008, 25(5):1668-1671.

【7】Yih J N, Chu Y M, Mao Y C, et al. Optical waveguide biosensors constructed with subwavelength gratings [J]. Appl. Opt., 2006, 45(9):1938-1942.

【8】Hoa X D, Kirk A G, Tabrizian M. Enhanced SPR response from patterned immobilization of surface bioreceptors on nano-gratings [J]. Biosens. Bioelectron., 2009, 24(10):3043-3048.

【9】Chen Y B. Development of mid-infrared surface plasmon resonance-based sensors with highly-doped silicon for biomedical and chemical applications [J]. Opt. Express, 2009, 17(5): 3130-3140.

【10】William D P, Bong J L, Keunhan P. Design analysis of doped-silicon surface plasmon resonance immunosensors in mid-infrared range [J]. Opt. Express, 2010, 18(18): 19396-19406.

【11】Pendry J B, Martin-Moreno L, Garcia-Vidal F J. Mimicking surface plasmons with structured surfaces [J]. Science, 2004, 365(5685):847-848.

【12】Yu N, Wang Q J, Kats M A, et al. Designer spoof surface plasmon structures collimate terahertz laser beams [J]. Nat. Mater. 2010, 9(9):730-735.

引用该论文

ZHENG Gai-Ge,CHEN Yun-Yun,XU Lin-Hua,LAI Min. Fabrication and application of high aspect ratio metallic gratings for sensing in the mid-infrared region[J]. Journal of Infrared and Millimeter Waves, 2013, 32(2): 154-159

郑改革,陈云云,徐林华,赖敏. 高深宽比金属光栅制备及中红外波段传感特性[J]. 红外与毫米波学报, 2013, 32(2): 154-159

被引情况

【1】吕江涛,杨琳娟,谷琼婵,姜潇潇,王凤文,司光远. 表面等离子阵列结构中的耦合增强反射效应及其红外光谱增强特性. 红外与毫米波学报, 2014, 33(6): 635-641

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