红外与毫米波学报, 2013, 32 (2): 165, 网络出版: 2013-04-18
140GHz MEMS矩形波导滤波器
MEMS rectangular waveguide filter at 140 GHz
摘要
设计并实现了一种采用微机械制造(MEMS)技术加工的D波段矩形波导膜片滤波器.采用有限元仿真软件HFSS分析了滤波器内腔镀膜厚度、粗糙度以及感性膜片厚度对滤波器主要性能的影响.采用MEMS深刻蚀工艺(DRIE)成功加工出了滤波器主体结构.通过完成结构深刻蚀、金属电镀和键合等关键工艺, 首次制造出了D波段 MEMS波导滤波器.样品测试结果为插入损耗0.4~0.7 dB, 中心频率(140±3) GHz, 带外抑制为≥18 dB, 样品主要技术指标与设计值符合.
Abstract
The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.
赵兴海, 单光存, 郑英彬, 杜亦佳, 陈颖慧, 鲍景富, 苏伟. 140GHz MEMS矩形波导滤波器[J]. 红外与毫米波学报, 2013, 32(2): 165. ZHAO Xing-Hai, SHAN Guang-Cun, ZHENG Ying-Bin, DU Yi-Jia, CHEN Ying-Hui, BAO Jing-Fu, SU Wei. MEMS rectangular waveguide filter at 140 GHz[J]. Journal of Infrared and Millimeter Waves, 2013, 32(2): 165.