Chinese Optics Letters, 2013, 11 (s1): S10208, Published Online: May. 30, 2013
2-nm narrow band pass f ilter in standard conf iguration evaporate coating machine Download: 965次
310.1860 Deposition and fabrication 310.6845 Thin film devices and applications 280.4788 Optical sensing and sensors 350.2450 Filters, absorption
Abstract
High sophisticated optical monitoring systems like the OMS 5000 from Leyboldoptics are commonly used in vacuum coating system to improve the capabilities and reliability of production processes concerning optical performance and repeatability optics. This letter describes a method to perform high end optical filters with additional backside blocking over a wide spectral range. The direct monitoring with intermittent measurement on a large area rotating substrate holder is used to facilitate a narrow band pass filter of 2-nm half bandwidth at 532 nm and high transmittance together with a complex blocking filter to retard disturbing radiation from the ultraviolet (UV) range to the near infrared range. The machine is an ARES 1 350 coating system with basically standard configuration.
Jingwei Li, R. Goetzelmann, Xiaoyi Wang, Jiangfan Wu, Chang Xiao. 2-nm narrow band pass f ilter in standard conf iguration evaporate coating machine[J]. Chinese Optics Letters, 2013, 11(s1): S10208.