干涉测量的方法已被广泛应用于光学系统的波前测试中。但是由于高数值孔径的标准具加工成本高、风险大,使用干涉测量的方法对高数值孔径光学系统进行测试存在困难。运用相位复原技术对高数值以小孔衍射光束作为高精度测试基准波前进行孔径光学系统波前测试,可以解决上述问题。对不同频率波前形成的点扩散函数模拟,分析了实际测试所需的实验条件。由于缺乏高精度的对比实验条件,引入一种新的误差分析方法,搭建检测平台完成对显微镜光学系统的波前测试。通过验证实验,证明了该测试方法的可靠性。

The interferometric method has been widely used in wavefront sensing of optical systems, however, manufacturing a reference objective with high numerical aperture (NA) has high production costs and risks. The optical interferometric method used in wavefront sensing of the optical system with high NA meets trouble. Using the phase retrieval method, a wavefront testing for optical system with high NA was done and diffraction beam from a pinhole was used as an ideal testing wavefront. The point spread functions (PSF) of wavefront with different frequencies were simulated, and the actual condition need was analyzed. A novel way was introduced into the error analysis, due to the lack of high accurate contrast verification. Wavefront sensing of a microscope optical system has been completed. Through this confirmatory experiment, its results verify this method.