利用斩波器将连续激光斩波成为脉冲宽度μs量级重频脉冲激光,利用选单器将重频脉冲激光转变成单脉冲激光,从而实现变连续激光为单脉冲激光。由陷阱探测器测量连续激光的输出功率,高速APD、高增益PIN探测器作为波形探测器测量脉冲激光波形,并通过示波器对脉冲宽度进行测量。依据测量得到的功率和波形就可得到脉冲激光能量,从而实现了0.2 pJ激光微能量的测量和校准,通过不确定度分析,该装置的pJ激光能量测量不确定度达到了0.42%。

A chopper was used to change continuous laser into microsecond repetition-rate pulse width laser, then a single pulse chooser was used to make a single pulse laser from the repetition-rate laser. A trap detector was used to measure the output power of the continuous laser. Besides, the high-speed APD probe and high-gain PIN probe were used to detect the waveform of the pulse laser waveform, and the oscilloscope was used to measure the width of the pulse laser. Based on the measured power and waveform, the pulse lasers energy could be obtained. Using this method, the 0.2 pJ micro energy laser measurement and calibration could be realized. Through analysis, the measurement uncertainty of the device reached 0.42%.