光学技术, 2013, 39 (3): 273, 网络出版: 2013-05-22
利用光声效应研究ITO薄膜的光吸收率
Study on optical absorptivity of ITO thin film by photoacoustic effect
光声光谱 光声效应 ITO薄膜 光吸收率 photoacoustic spectrum photoacoustic effect ITO thin films optical absorption rate
摘要
利用基于压电效应的光声技术, 研究了ITO薄膜在可见光波段的吸收特性, 并与分光型光学薄膜分析系统NKD8000测得的数据进行了比较, 得到了一致性较好的结果。实验证实: 在可见光波段, 该ITO薄膜的吸收率随波长呈非线性变化, 在450nm附近吸收最强, 随着波长的增加逐渐减小, 在514.7nm处接近于零, 之后又缓慢增大。
Abstract
Using the photoacoustic technology which is based on the piezoelectric effects, the optical absorption characteristic of ITO thin film is studied by piezoelectric photoacoustic (PZPA) technique in optical light. The results are in a good agreement with the data obtained by the CDIR thin film analysis system NKD8000. Experiments prove that the optical absorption rate of the ITO film non-linearly changes with the wavelength in the visible light range, nearby 450nm, the absorption is the strongest, and the absorption decrease gradually along with the increase of the wavelength, in 514.7nm place, it is close to zero, then increase slowly.
郭文娟, 袁萍, 张进兵, 张硕. 利用光声效应研究ITO薄膜的光吸收率[J]. 光学技术, 2013, 39(3): 273. GUO Wenjuan, YUAN Ping, ZHANG Jinbing, ZHANG Shuo. Study on optical absorptivity of ITO thin film by photoacoustic effect[J]. Optical Technique, 2013, 39(3): 273.