利用MEMS工艺制备了基于SOI的小尺寸、高集成光波导多环级联谐振腔滤波器，理论分析了多环级联微环腔的光场传输特性与光谱响应特性，实验验证并得到了不同级联环数与谐振谱线滚降垂直度的关系。研究表明：当波导宽度为450 nm、半径为5 μm时，单环、双环和十环滤波器响应谱线的－3 dB带宽分别为0.313， 0.279， 0.239 nm，相应结果与理论吻合，即随着级联环数的增多，谐振谱线顶端趋于平坦，滚降垂直度增高。设计制备了环形与跑道形两种级联谐振腔滤波器，研究了相应的透射谱特性。

Based on Silicon on insulator(SOI) material and mature Micro electro mechanical systems (MEMS) technology, an optical waveguide cascaded resonator filter with high integration and small size was processed. The light field transmission characteristics and spectral response characteristics of multi ring cascaded cavity were theoretically analyzed. Moreover, the relationship between different number of cascaded micro ring and resonance spectrum roll off verticality was also proved in experiment. When the waveguide width is 450 nm and radius is 5 μm, the experimental results show that －3 dB response bandwidth of the 1st order, 2nd order and 10th order filters spectral are 0.313, 0.279 and 0.239 nm,which are consistent with the theoretical results. That means more cascaded rings result in flatter top resonance and higher roll off vertical degree. Micro ring and racetrack shaped cascaded resonator filters were fabricated and the properties of transmission spectrum was also tested.