针对现有球面光学元件表面疵病检测技术研究较少的情况, 根据疵病对光的散射特性, 提出了一种基于机器视觉技术检测球面光学元件表面疵病的方法。实验分析了光照角度、光强大小和球面光学元件曲率半径对疵病散射光成像质量的影响。并对口径为Φ14 mm, 曲率半径为13 mm的球面光学元件表面进行了检测, 实验表明, 该技术对元件样品上10 μm以下的表面疵病可进行有效的检测。

Based on the fact that the current research of detection technology for spherical optical element surface defect disease was very little, on the basis of scattering properties between defect disease and light, a method of detection technology research for spherical optical element surface defect disease based on the machine vision technology was put forward. The experiments analyzed three factors (illumination angle, light powerful, radius of curvature) that affect the imaging quality of defect disease scattering light. In addition, the surface of spherical optical element was tested (caliber is 14 mm, curvature radius is 13 mm). Finally, it was proved that the technology could effectively detect defect disease with size less than 10 μm.