采用过滤阴极真空弧法，制备了满足激光稳相加速机制要求的超薄自支撑类金刚石碳靶。室温下沉积，基片偏压为-32 V，薄膜沉积速率约为每脉冲0.002 nm。选取NaCl膜作脱膜剂，采用漂浮法进行脱膜。打捞板孔径为1 mm时，自支撑厚度范围为5~50 nm，自支撑成功率约为70%。利用拉曼光谱仪及原子力显微镜等仪器，测量了薄膜的结构、表面粗糙度等关键参数。

Self-supporting diamond-like-carbon (DLC) films have been manufactured successfully using the filtered cathodic vacuum arc system, which are ideal targets for laser phase-stable acceleration regime. The film is deposited at room temperature with a -32 V substrate bias voltage. The deposition rate is about 0.002 nm per pulse. Practically, the NaCl is deposited first as a sacrificial layer before carbon deposition. A holder with round holes is used to support the DLC film after the NaCl layer is dissolved in the water. Films with thickness 5-50 nm can mount over the apertures with a diameter up to 1 mm and the success rate is about 70%. The structure and roughness of the film have been measured by the Raman spectrum and atomic force microscope.