为了提高非晶硅薄膜电池的转换效率和稳定性，采用纳秒紫外激光进行透明导电薄膜制绒，改变激光工艺参数，研究激光功率密度、重复频率、刻蚀速度和填充间距对透明导电薄膜电学、光学和晶体结构特性的影响；并根据不同制绒方式制备电池，比较其输出性能。实验结果证明：当激光功率密度P=0.85×105 W/cm2，刻蚀速度v=600 mm/s，重复频率f=50 kHz，填充间距Δd=0.012 mm时，获得薄膜方块电阻较小，陷光效果良好的绒面结构，有效地增强了电池吸收率，提高了电池的转换效率。

In order to enhance conversion efficiency and stability of thin film amorphous silicon solar cells, the nanosecond pulse laser is used to make the transparent conducting films textured. Transparent conducting film′s electrical, optical and crystal structure characteristics are discussed with changing laser parameters, such as laser power density, frequency repetition, etching speed and filling spacing. A comparison is made with the performance of cells manufactured by different texturing ways. The experiment results indicate that when laser power density is 0.85×105 W/cm2, etching speed is 600 mm/s, repetition frequency is 50 kHz, and filling spacing is 0.012 mm, the textured structure of transparent conducting films has less square resistance and more effective light trapping. It effectively improves the absorption, and enhances the conversion efficiency of cells.